Inventor
ZHOU DASHUN S
US5 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU DASHUN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6231674B1May 15, 2001
Wafer edge deposition elimination
APPLIED MATERIALS INC53 citations95
US6033480AMar 7, 2000
Wafer edge deposition elimination
APPLIED MATERIALS INC51 citations95
US5858464AJan 12, 1999
Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers
APPLIED MATERIALS INC21 citations92