Inventor

TOKUNAGA KYOJI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “TOKUNAGA KYOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAWASAKI STEEL CO

2 patents

US5290736AMar 1, 1994

Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric

KAWASAKI STEEL CO62 citations94

US6423651B1Jul 23, 2002

Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating film

KAWASAKI STEEL CO9 citations71

KAWASAKI MICROELECTRONICS INC

1 patent

US6828258B2Dec 7, 2004

Method of forming an insulating film having SI-C, SI-O and SI-H bonds to cover wiringlines of a semiconductor device

KAWASAKI MICROELECTRONICS INC0 citations49