Inventor
CLEARY TIMOTHY PATRICK
US4 patents
Patents
4 patentsUS6755954B2Jun 29, 2004
Electrochemical treatment of integrated circuit substrates using concentric anodes and variable field shaping elements
NOVELLUS SYSTEMS INC140 citations97
US7338908B1Mar 4, 2008
Method for fabrication of semiconductor interconnect structure with reduced capacitance, leakage current, and improved breakdown voltage
NOVELLUS SYSTEMS INC66 citations96
US7531463B2May 12, 2009
Fabrication of semiconductor interconnect structure
NOVELLUS SYSTEMS INC31 citations91
US7897198B1Mar 1, 2011
Electroless layer plating process and apparatus
NOVELLUS SYSTEMS INC16 citations82