Inventor · disambiguated record

Shunya Kubota

Also filed as: KUBOTA SHUNYA

1 granted patent·0 citations·filing 2020–2020

4Inventor score

Technology areasH10P

Files withSHIN ETSU ENG CO LTD1

Top patents by PatentIndex Score

1 record

0140US11322384B2Substrate processing apparatus and substrate processing methodSHIN ETSU ENG CO LTD·Filed 2020·Granted May 3, 2022·0 cites·12 claims

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