Inventor
SANCHEZ Mario Dan
US3 patents
Patents
3 patentsUS11384432B2Jul 12, 2022
Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate
APPLIED MATERIALS INC5 citations71
US10704142B2Jul 7, 2020
Quick disconnect resistance temperature detector assembly for rotating pedestal
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US11932939B2Mar 19, 2024
Lids and lid assembly kits for atomic layer deposition chambers
APPLIED MATERIALS INC0 citations60