Inventor
NISHIMURA MITSUHIDE
JP7 patents
Patents
7 patentsUS11112701B2Sep 7, 2021
Control device, control method, lithographic apparatus, method of manufacturing article, and storage medium
CANON KK2 citations70
US10133177B2Nov 20, 2018
Exposure apparatus, exposure method, and article manufacturing method
CANON KK3 citations68
US12436471B2Oct 7, 2025
Control apparatus, lithography apparatus, and article manufacturing method
CANON KK0 citations59
US11327411B2May 10, 2022
Substrate processing apparatus and article manufacturing method
CANON KK1 citations53
US11048176B2Jun 29, 2021
Substrate processing apparatus and article manufacturing method
CANON KK1 citations53
US10635005B2Apr 28, 2020
Exposure apparatus, method thereof, and method of manufacturing article
CANON KK0 citations49
US10558128B2Feb 11, 2020
Control device, lithography apparatus, and method of manufacturing article
CANON KK0 citations38