Inventor

ROSENCWAIG ALLAN

US59 patents

⚠️ This page may combine multiple inventors who share the name “ROSENCWAIG ALLAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ROSENCWAIG ALLAN

THERMA WAVE INC

Optical scatterometry of asymmetric lines and structures

Critical dimension analysis with simultaneous multiple angle of incidence measurements

Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements

Critical dimension analysis with simultaneous multiple angle of incidence measurements

Apparatus for analyzing multi-layer thin film stacks on semiconductors

Apparatus for analyzing multi-layer thin film stacks on semiconductors

Method and apparatus for evaluating the thickness of thin films

Optical measurement device with enhanced sensitivity

Method and apparatus for evaluating surface and subsurface features in a semiconductor

Method and apparatus for optically detecting surface states in materials

Thin film thickness measurement with thermal waves

Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements

Sample characteristic analysis utilizing multi wavelength and multi angle polarization and magnitude change detection

Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices

High resolution ellipsometric apparatus

Method and apparatus for measuring thickness of thin films

Method and apparatus for evaluating surface conditions of a sample

Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry

Critical dimension analysis with simultaneous multiple angle of incidence measurements

Apparatus for analyzing multi-layer thin film stacks on semiconductors

Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements

Method and apparatus for evaluating surface and subsurface and subsurface features in a semiconductor

Method and apparatus for evaluating surface and subsurface features in a semiconductor

Evaluating both thickness and compositional variables in a thin film sample

Method and apparatus for detecting thermal waves

Evaluation of surface and subsurface characteristics of a sample

Method for detection of thermal waves with a laser probe

Thin film thickness measurements and depth profiling utilizing a thermal wave detection system

Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy

Apparatus for locating and testing areas of interest on a workpiece

Critical dimension analysis with simultaneous multiple angle of incidence measurements

Critical dimension analysis with simultaneous multiple angle of incidence measurements

Method of monitoring the fabrication of thin film layers forming a DWDM filter

Apparatus for analyzing multi-layer thin film stacks on semiconductors

Apparatus for measuring grain sizes in metalized layers

Optical inspection equipment for semiconductor wafers with precleaning

Combination thin-film stress and thickness measurement device

Monitoring temperature and sample characteristics using a rotating compensator ellipsometer

Apparatus for evaluating thermal and electrical characteristics in a sample

Optical inspection equipment for semiconductor wafers with precleaning

Optical inspection equipment for semiconductor wafers with precleaning

ROSENCWAIG ALLAN

Thermoacoustic microscopy

Methods and means for analyzing substances

Liquid chromatography detector

(unassigned)

Apparatus for non-invasive analyses of biological compounds

THERMA WAVE PARTNERS

Detecting thermal waves to evaluate thermal parameters

US ENERGY

Method for introduction of gases into microspheres

HOFFMANN LA ROCHE

Photo acoustic cell

ARIST INSTR INC

Beam profile complex reflectance system and method for thin film and critical dimension measurements

OPSAL JON

Modulated reflectance measurement system using UV probe