P

Inventor

STULEN RICHARD H

US6 patents
⚠️ This page may combine multiple inventors who share the name “STULEN RICHARD H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EUV LLC

3 patents
US6492067B1Dec 10, 2002

Removable pellicle for lithographic mask protection and handling

EUV LLC75 citations95
US6664554B2Dec 16, 2003

Self-cleaning optic for extreme ultraviolet lithography

EUV LLC36 citations91
US6533952B2Mar 18, 2003

Mitigation of radiation induced surface contamination

EUV LLC20 citations91

SANDIA CORP

1 patent
US5870176AFeb 9, 1999

Maskless lithography

SANDIA CORP243 citations98

(unassigned)

1 patent
US6060224AMay 9, 2000

Method for maskless lithography

117 citations96

US ENERGY

1 patent
US4538068AAug 27, 1985

Manipulator having thermally conductive rotary joint for transferring heat from a test specimen

US ENERGY6 citations56