Inventor
SHIMENO KAZUHIRO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “SHIMENO KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CO LTD
3 patentsUS5669644ASep 23, 1997
Wafer transfer plate
KOKUSAI ELECTRIC CO LTD90 citations93
US5960159ASep 28, 1999
Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety
KOKUSAI ELECTRIC CO LTD37 citations91
US6318944B1Nov 20, 2001
Semiconductor fabricating apparatus, method for modifying positional displacement of a wafer in a wafer cassette within the semiconductor fabricating apparatus and method for transferring the wafer cassette
KOKUSAI ELECTRIC CO LTD32 citations87