Inventor

SAMITSU YAMATO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SAMITSU YAMATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC CORP

2 patents

US6270392B1Aug 7, 2001

Polishing apparatus and method with constant polishing pressure

NEC CORP48 citations95

US6652354B2Nov 25, 2003

Polishing apparatus and method with constant polishing pressure

NEC CORP14 citations83

NIPPON STEEL CORP

1 patent

US5877088AMar 2, 1999

Flattening method and apparatus for semiconductor device

NIPPON STEEL CORP30 citations89