Inventor
JACOB DAVID E
US9 patents
⚠️ This page may combine multiple inventors who share the name “JACOB DAVID E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS7645341B2Jan 12, 2010
Showerhead electrode assembly for plasma processing apparatuses
LAM RES CORP576 citations98
US7543547B1Jun 9, 2009
Electrode assembly for plasma processing apparatus
LAM RES CORP39 citations92
US5796486AAug 18, 1998
Apparatus method for determining the presence or absence of a wafer on a wafer holder
LAM RES CORP43 citations92
US6750155B2Jun 15, 2004
Methods to minimize moisture condensation over a substrate in a rapid cycle chamber
LAM RES CORP23 citations90
US6543981B1Apr 8, 2003
Apparatus and method for creating an ultra-clean mini-environment through localized air flow augmentation
LAM RES CORP20 citations90
US6364762B1Apr 2, 2002
Wafer atmospheric transport module having a controlled mini-environment
LAM RES CORP43 citations87
US7827657B2Nov 9, 2010
Method of making an electrode assembly for plasma processing apparatus
LAM RES CORP11 citations84