Inventor
GOO JUSEON
KR3 patents
Patents
3 patentsUS7015144B2Mar 21, 2006
Compositions including perhydro-polysilazane used in a semiconductor manufacturing process and methods of manufacturing semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD15 citations90
US7585786B2Sep 8, 2009
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
SAMSUNG ELECTRONICS CO LTD11 citations82
US7429637B2Sep 30, 2008
Compositions including perhydro-polysilazane used in a semiconductor manufacturing process and methods of manufacturing semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD3 citations60