Inventor
BLOUCH STEPHEN C
US5 patents
⚠️ This page may combine multiple inventors who share the name “BLOUCH STEPHEN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
2 patentsUS7429863B2Sep 30, 2008
Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
BROOKS AUTOMATION INC8 citations71
US7656165B2Feb 2, 2010
Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
BROOKS AUTOMATION INC0 citations50