P

Inventor

SOYANO AKIMASA

JP6 patents
⚠️ This page may combine multiple inventors who share the name “SOYANO AKIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

4 patents
US7510817B2Mar 31, 2009

Photoresist polymer compositions

JSR CORP21 citations92
US6623907B2Sep 23, 2003

Radiation-sensitive resin composition

JSR CORP35 citations91
US6800419B2Oct 5, 2004

Radiation-sensitive resin composition

JSR CORP14 citations82
US8916333B2Dec 23, 2014

Radiation-sensitive resin composition

JSR CORP0 citations39

ASANO YUSUKE

1 patent
US9261780B2Feb 16, 2016

Radiation-sensitive resin composition, method for forming resist pattern, and polymer and compound

ASANO YUSUKE3 citations69

MATSUMURA NOBUJI

1 patent
US8507575B2Aug 13, 2013

Radiation-sensitive resin composition, polymer, and compound

MATSUMURA NOBUJI7 citations67