Inventor
VAN ASTEN NICOLAAS ANTONIUS ALLEGONDUS JOHANNES
NL3 patents
Patents
3 patentsUS7751059B2Jul 6, 2010
Method for correcting disturbances in a level sensor light path
ASML NETHERLANDS BV8 citations76
US7835017B2Nov 16, 2010
Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations59
US10588211B2Mar 10, 2020
Radiation source having debris control
ASML NETHERLANDS BV1 citations52