Inventor

ATKINSON JIM K

US7 patents

⚠️ This page may combine multiple inventors who share the name “ATKINSON JIM K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US9352471B1May 31, 2016

Substrate gripper apparatus and methods

APPLIED MATERIALS INC8 citations80

US10229842B2Mar 12, 2019

Double sided buff module for post CMP cleaning

APPLIED MATERIALS INC3 citations71

US9636714B2May 2, 2017

Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes

APPLIED MATERIALS INC0 citations43

US10256120B2Apr 9, 2019

Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning

APPLIED MATERIALS INC0 citations35

VELAZQUEZ EDWIN

1 patent

US8869422B2Oct 28, 2014

Methods and apparatus for marangoni substrate drying using a vapor knife manifold

VELAZQUEZ EDWIN6 citations76

KARUPPIAH LAKSHMANAN

1 patent

US8250695B2Aug 28, 2012

Roller assembly for a brush cleaning device in a cleaning module

KARUPPIAH LAKSHMANAN3 citations53

LISCHKA DAVID J

1 patent

US9013176B2Apr 21, 2015

Methods and apparatus for sensing a substrate in a load cup

LISCHKA DAVID J1 citations40