Inventor

TOYODA SATORU

JP8 patents

⚠️ This page may combine multiple inventors who share the name “TOYODA SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GONOHE NARISHI

4 patents

US8158197B2Apr 17, 2012

Method for forming tantalum nitride film

GONOHE NARISHI2 citations58

US8796142B2Aug 5, 2014

Method for forming tantalum nitride film

GONOHE NARISHI0 citations37

US8158198B2Apr 17, 2012

Method for forming tantalum nitride film

GONOHE NARISHI0 citations37

US8105468B2Jan 31, 2012

Method for forming tantalum nitride film

GONOHE NARISHI0 citations37

ULVAC INC

1 patent

US6280585B1Aug 28, 2001

Sputtering apparatus for filling pores of a circular substrate

ULVAC INC71 citations91

ULVAC CORP

1 patent

US4816046AMar 28, 1989

Fine particle collector trap for vacuum evacuating system

ULVAC CORP28 citations86

KODAIRA SHUJI

1 patent

US9005413B2Apr 14, 2015

Film formation apparatus

KODAIRA SHUJI4 citations60

KUMAMOTO SHOICHIRO

1 patent

US8809193B2Aug 19, 2014

Method for the formation of Co film and method for the formation of Cu interconnection film

KUMAMOTO SHOICHIRO0 citations42