Inventor
YABU SHUICHI
JP14 patents
Patents
14 patentsUS6414742B1Jul 2, 2002
Stage apparatus, and exposure apparatus and device manufacturing method using the same
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US4907021AMar 6, 1990
Projection exposure apparatus
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US4786947ANov 22, 1988
Projection exposure apparatus
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US6157159ADec 5, 2000
Stage system and exposure apparatus using the same
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US4998821AMar 12, 1991
Projection apparatus
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US4869481ASep 26, 1989
Plate-like article holding device
CANON KK33 citations92
US4814625AMar 21, 1989
Exposure apparatus having gas supplying means for air blow off
CANON KK46 citations92
US4506977AMar 26, 1985
Transfer apparatus provided with an auto-focusing mechanism
CANON KK33 citations92
US7777762B2Aug 17, 2010
Image processing device and method for design
CANON KK14 citations84
US6873397B2Mar 29, 2005
Exposure apparatus, gas replacing method, and method of manufacturing a semiconductor device
CANON KK14 citations83
US6226072B1May 1, 2001
Stage system and exposure apparatus with the same
CANON KK13 citations73
US4662753AMay 5, 1987
Apparatus and method for aligning objects
CANON KK11 citations73
US4479711AOct 30, 1984
Mask aligner
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US6947140B2Sep 20, 2005
Birefringence measurement apparatus and method
CANON KK0 citations51