P

Inventor

TSUSHIMA HIROAKI

JP36 patents
⚠️ This page may combine multiple inventors who share the name “TSUSHIMA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GIGAPHOTON INC

25 patents
US10038295B2Jul 31, 2018

Gas laser apparatus

GIGAPHOTON INC6 citations83
US9722384B2Aug 1, 2017

Gas laser apparatus

GIGAPHOTON INC4 citations83
US9742141B2Aug 22, 2017

Laser chamber

GIGAPHOTON INC6 citations72
US8867583B2Oct 21, 2014

Excimer laser apparatus and excimer laser system

GIGAPHOTON INC3 citations63
US10879664B2Dec 29, 2020

Laser gas regeneration system and laser system

GIGAPHOTON INC1 citations62
US11451003B2Sep 20, 2022

Laser gas regenerating apparatus and electronic device manufacturing method

GIGAPHOTON INC1 citations61
US11081850B2Aug 3, 2021

Gas laser apparatus

GIGAPHOTON INC0 citations61
US10971883B2Apr 6, 2021

Gas laser apparatus

GIGAPHOTON INC0 citations61
US10965085B2Mar 30, 2021

Laser chamber with metal damper member

GIGAPHOTON INC1 citations60
US12388228B2Aug 12, 2025

Laser device and leak check method for laser device

GIGAPHOTON INC0 citations57
US9954340B2Apr 24, 2018

Excimer laser apparatus and excimer laser system

GIGAPHOTON INC0 citations52
US9853410B2Dec 26, 2017

Gas laser device and control method therefor

GIGAPHOTON INC0 citations52
US9490603B2Nov 8, 2016

Laser apparatus and method of controlling laser apparatus

GIGAPHOTON INC0 citations52
US9425576B2Aug 23, 2016

Excimer laser apparatus and excimer laser system

GIGAPHOTON INC1 citations52
US10666008B2May 26, 2020

Gas laser apparatus

GIGAPHOTON INC0 citations51
US10164396B2Dec 25, 2018

Laser unit and non-transitory computer-readable storage medium

GIGAPHOTON INC0 citations51
US9825417B2Nov 21, 2017

Laser unit and non-transitory computer-readable storage medium

GIGAPHOTON INC1 citations51
US9748727B2Aug 29, 2017

Preliminary ionization discharge device and laser apparatus

GIGAPHOTON INC1 citations51
US9373926B2Jun 21, 2016

Laser chamber and discharge excitation gas laser apparatus

GIGAPHOTON INC1 citations50
US9331450B2May 3, 2016

Laser apparatus

GIGAPHOTON INC0 citations50
US9350133B2May 24, 2016

Method of controlling laser apparatus and laser apparatus

GIGAPHOTON INC0 citations42
US9722385B2Aug 1, 2017

Laser chamber

GIGAPHOTON INC0 citations40
US10673200B2Jun 2, 2020

Excimer laser apparatus

GIGAPHOTON INC0 citations39
US10096966B2Oct 9, 2018

Gas laser device and condenser

GIGAPHOTON INC0 citations38
US10050403B2Aug 14, 2018

Excimer laser chamber device

GIGAPHOTON INC0 citations38

MITSUI TOATSU CHEMICALS

5 patents

SHIMADZU CORP

4 patents

MITSUI CHEMICALS INC

1 patent

TSUSHIMA HIROAKI

1 patent