Inventor
ANJOU ICHIROU
JP3 patents
Patents
3 patentsUS6028364AFeb 22, 2000
Semiconductor device having a stress relieving mechanism
HITACHI LTD167 citations98
US5910010AJun 8, 1999
Semiconductor integrated circuit device, and process and apparatus for manufacturing the same
HITACHI LTD112 citations95
US6423571B2Jul 23, 2002
Method of making a semiconductor device having a stress relieving mechanism
HITACHI LTD35 citations92