Inventor
FLANDERS STEVEN D
US4 patents
Patents
4 patentsUS5503951AApr 2, 1996
Attenuating phase-shift mask structure and fabrication method
IBM80 citations93
US6534225B2Mar 18, 2003
Tapered ion implantation with femtosecond laser ablation to remove printable alternating phase shift features
IBM17 citations82
US6270949B1Aug 7, 2001
Single component developer for copolymer resists
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US6426177B2Jul 30, 2002
Single component developer for use with ghost exposure
IBM0 citations45