Inventor
MILLER ALAN
38 patents
⚠️ This page may combine multiple inventors who share the name “MILLER ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS6344105B1Feb 5, 2002
Techniques for improving etch rate uniformity
LAM RES CORP141 citations97
US7204934B1Apr 17, 2007
Method for planarization etch with in-situ monitoring by interferometry prior to recess etch
LAM RES CORP10 citations81
US7425277B1Sep 16, 2008
Method for hard mask CD trim
LAM RES CORP4 citations60
US7316785B2Jan 8, 2008
Methods and apparatus for the optimization of etch resistance in a plasma processing system
LAM RES CORP3 citations60
US7667281B2Feb 23, 2010
Method for hard mask CD trim
LAM RES CORP0 citations49
COLTENE/WHALEDENT INC
5 patentsUSD321564SNov 12, 1991
Ultrasonic cleaner
COLTENE/WHALEDENT INC31 citations92
USD315815SMar 26, 1991
Ultrasonic cleaner
COLTENE/WHALEDENT INC26 citations92
USD314822SFeb 19, 1991
Dental pin
COLTENE/WHALEDENT INC14 citations74
USD314821SFeb 19, 1991
Dental pin
COLTENE/WHALEDENT INC9 citations74
USD318916SAug 6, 1991
Control unit for dental electro surgery
COLTENE/WHALEDENT INC1 citations52