Inventor

LOWRANCE BOB

US2 patents

Patents

2 patents

US6416647B1Jul 9, 2002

Electro-chemical deposition cell for face-up processing of single semiconductor substrates

APPLIED MATERIALS INC476 citations97

US6599402B2Jul 29, 2003

Electro-chemical deposition cell for face-up processing of single semiconductor substrates

APPLIED MATERIALS INC13 citations82