Inventor
CORDES STEVEN ALAN
US14 patents
⚠️ This page may combine multiple inventors who share the name “CORDES STEVEN ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS6614109B2Sep 2, 2003
Method and apparatus for thermal management of integrated circuits
IBM72 citations95
US6893902B2May 17, 2005
Method and apparatus for thermal management of integrated circuits
IBM38 citations91
US6192100B1Feb 20, 2001
X-ray mask pellicles and their attachment in semiconductor manufacturing
IBM47 citations91
US6613602B2Sep 2, 2003
Method and system for forming a thermoelement for a thermoelectric cooler
IBM30 citations89
US6562642B1May 13, 2003
Micro-structures and methods for their manufacture
IBM13 citations83
US6713827B2Mar 30, 2004
Micro-structures and methods for their manufacture
IBM11 citations73
US6679625B2Jan 20, 2004
Scanning heat flow probe
IBM6 citations72
US6866415B2Mar 15, 2005
Scanning heat flow probe
IBM1 citations61
US6817761B2Nov 16, 2004
Scanning heat flow probe
IBM2 citations61
US6652139B2Nov 25, 2003
Scanning heat flow probe and the method of fabricating the same
IBM3 citations61
US7456640B2Nov 25, 2008
Structure for coupling probes of probe device to corresponding electrical contacts on product substrate
IBM6 citations54
US7029830B2Apr 18, 2006
Precision and apertures for lithographic systems
IBM0 citations40