Inventor
KIM KEECHAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “KIM KEECHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS10629458B2Apr 21, 2020
Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter
LAM RES CORP1 citations72
US10832923B2Nov 10, 2020
Lower plasma-exclusion-zone rings for a bevel etcher
LAM RES CORP0 citations51
US10811282B2Oct 20, 2020
Upper plasma-exclusion-zone rings for a bevel etcher
LAM RES CORP0 citations51
US10748747B2Aug 18, 2020
Edge exclusion control with adjustable plasma exclusion zone ring
LAM RES CORP0 citations51
US12387915B2Aug 12, 2025
Lower plasma exclusion zone ring for bevel etcher
LAM RES CORP0 citations50
US9799496B2Oct 24, 2017
Edge exclusion control with adjustable plasma exclusion zone ring
LAM RES CORP0 citations43
KIM KEECHAN
3 patentsUS8257503B2Sep 4, 2012
Method and apparatus for detecting plasma unconfinement
KIM KEECHAN2 citations60
US8852384B2Oct 7, 2014
Method and apparatus for detecting plasma unconfinement
KIM KEECHAN1 citations49
US9184030B2Nov 10, 2015
Edge exclusion control with adjustable plasma exclusion zone ring
KIM KEECHAN0 citations41