Inventor
BRASHEAR KEVIN M
US4 patents
Patents
4 patentsUS11169547B2Nov 9, 2021
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC2 citations70
US11519773B2Dec 6, 2022
Methods, systems, and apparatus for mass flow verification based on choked flow
APPLIED MATERIALS INC0 citations60
US10684159B2Jun 16, 2020
Methods, systems, and apparatus for mass flow verification based on choked flow
APPLIED MATERIALS INC1 citations60
US11520358B2Dec 6, 2022
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC0 citations59