Inventor

ERGIN TOLGA

DE5 patents

Patents

5 patents

US10327318B2Jun 18, 2019

Adjusting a beam diameter and an aperture angle of a laser beam

TRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH2 citations64

US11835699B2Dec 5, 2023

Focusing device and EUV radiation generating device having same

TRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH0 citations58

US11675202B2Jun 13, 2023

Reflective optical element, beam guiding device and EUV-beam generating device

TRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH0 citations58

US12171054B2Dec 17, 2024

EUV light source with a beam positioning device

TRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH0 citations45

US11304286B2Apr 12, 2022

Polarizer

TRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH0 citations44