Inventor
SAKASHITA KUNIYASU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SAKASHITA KUNIYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11047044B2Jun 29, 2021
Film forming apparatus and film forming method
TOKYO ELECTRON LTD2 citations70
US11993848B2May 28, 2024
Gas nozzle, substrate processing apparatus, and substrate processing method
TOKYO ELECTRON LTD1 citations59
US11859285B2Jan 2, 2024
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations45
US11885024B2Jan 30, 2024
Gas introduction structure and processing apparatus
TOKYO ELECTRON LTD0 citations44