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Inventor

SRIVASTAVA ASEEM K

US8 patents
⚠️ This page may combine multiple inventors who share the name “SRIVASTAVA ASEEM K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

3 patents
US6225745B1May 1, 2001

Dual plasma source for plasma process chamber

AXCELIS TECH INC490 citations97
US7892357B2Feb 22, 2011

Gas distribution plate assembly for plasma reactors

AXCELIS TECH INC20 citations90
US7845310B2Dec 7, 2010

Wide area radio frequency plasma apparatus for processing multiple substrates

AXCELIS TECH INC11 citations83

SRIVASTAVA ASEEM K

2 patents
US8932430B2Jan 13, 2015

RF coupled plasma abatement system comprising an integrated power oscillator

SRIVASTAVA ASEEM K22 citations89
US8906195B2Dec 9, 2014

Tuning hardware for plasma ashing apparatus and methods of use thereof

SRIVASTAVA ASEEM K0 citations45

EATON CORP

1 patent
US6057645AMay 2, 2000

Plasma discharge device with dynamic tuning by a movable microwave trap

EATON CORP75 citations90

APPLIED MATERIALS INC

1 patent
US10937646B1Mar 2, 2021

Method for isolating gates in transistors

APPLIED MATERIALS INC0 citations50

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent
US9783884B2Oct 10, 2017

Method for implementing low dose implant in a plasma system

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations35