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Inventor
GOH EDWIN
SG
3 patents
⚠️ This page may combine multiple inventors who share the name “GOH EDWIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
2 patents
US6451687B1
Sep 17, 2002
Intermetal dielectric layer for integrated circuits
CHARTERED SEMICONDUCTOR MFG
19 citations
91
US6528886B2
Mar 4, 2003
Intermetal dielectric layer for integrated circuits
CHARTERED SEMICONDUCTOR MFG
2 citations
61
NOVELLUS SYSTEMS INC
1 patent
US9394620B2
Jul 19, 2016
Control of electrolyte hydrodynamics for efficient mass transfer during electroplating
NOVELLUS SYSTEMS INC
13 citations
83