Inventor
AIDA HISASHI
JP6 patents
Patents
6 patentsUS6488984B1Dec 3, 2002
Film deposition method and apparatus
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Sputtering reactor and method of using an unbalanced magnetron
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US6852626B1Feb 8, 2005
Film deposition method and apparatus
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US6576567B1Jun 10, 2003
Film deposition method and apparatus for semiconductor devices
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US6511538B1Jan 28, 2003
Film deposition method and apparatus for semiconductor devices
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US6593252B1Jul 15, 2003
Film deposition method and apparatus
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