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Inventor
HONG YONG-SUNG
KR
3 patents
⚠️ This page may combine multiple inventors who share the name “HONG YONG-SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patents
US6899609B2
May 31, 2005
CMP equipment for use in planarizing a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD
15 citations
77
US6595836B2
Jul 22, 2003
Calibration device for pad conditioner head of a CMP machine
SAMSUNG ELECTRONICS CO LTD
0 citations
45
HONG YONG-SUNG
1 patent
US8202140B2
Jun 19, 2012
Wafer polishing carrier apparatus and chemical mechanical polishing equipment using the same
HONG YONG-SUNG
12 citations
70