Inventor
SUZUKAWA HIROKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKAWA HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
4 patentsUS4962423AOct 9, 1990
Mark detecting method and apparatus
CANON KK97 citations95
US4933715AJun 12, 1990
Method of detecting position of a mark
CANON KK25 citations92
US6499007B1Dec 24, 2002
Parameter editing method and semiconductor exposure system
CANON KK22 citations91
US6784974B1Aug 31, 2004
Exposure method and exposure apparatus
CANON KK0 citations48