Inventor
TSUNODA RIKITA
JP5 patents
Patents
5 patentsUS9696625B2Jul 4, 2017
Method of forming resist pattern
TOKYO OHKA KOGYO CO LTD6 citations68
US10429740B2Oct 1, 2019
Method of recovering resist pattern
TOKYO OHKA KOGYO CO LTD1 citations58
US9618845B2Apr 11, 2017
Method for forming resist pattern, resist pattern splitting agent, split pattern improving agent, resist pattern splitting material, and positive resist composition for forming split pattern
TOKYO OHKA KOGYO CO LTD0 citations40
US9581909B2Feb 28, 2017
Method of trimming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations39
US9459528B2Oct 4, 2016
Negative tone resist composition for solvent developing and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations39