Inventor
SARASWATULA JAGDISH CHANDRA
IN5 patents
⚠️ This page may combine multiple inventors who share the name “SARASWATULA JAGDISH CHANDRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS11119060B2Sep 14, 2021
Defect location accuracy using shape based grouping guided defect centering
KLA TENCOR CORP2 citations70
US10503078B2Dec 10, 2019
Criticality analysis augmented process window qualification sampling
KLA TENCOR CORP1 citations60
US11035666B2Jun 15, 2021
Inspection-guided critical site selection for critical dimension measurement
KLA TENCOR CORP0 citations47
US10714366B2Jul 14, 2020
Shape metric based scoring of wafer locations
KLA TENCOR CORP0 citations38