Inventor
HITOKAWA Hiroshi
JP4 patents
⚠️ This page may combine multiple inventors who share the name “HITOKAWA Hiroshi”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AZ ELECTRONIC MAT LUXEMBOURG SARL
3 patentsUS11079680B2Aug 3, 2021
High heat resistance resist composition and pattern forming method using the same
AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations47
US10106428B2Oct 23, 2018
Method for producing surface-modified silica nanoparticles, and surface-modified silica nanoparticles
AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations46
US11221558B2Jan 11, 2022
Bottom antireflective coating forming composition
AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations42