Inventor
YOKOMATSU TAKAO
JP6 patents
Patents
6 patentsUS4810889AMar 7, 1989
Fine circuit pattern drawing apparatus and method
CANON KK76 citations95
US4749283AJun 7, 1988
Static pressure bearing
CANON KK89 citations93
US8365615B2Feb 5, 2013
Piezoelectric vibration type force sensor
CANON KK8 citations82
US7915787B2Mar 29, 2011
Actuator
CANON KK10 citations82
US4768064AAug 30, 1988
Conveyor device for alignment
CANON KK8 citations73
US4588288AMay 13, 1986
Static pressure bearing and transport device utilizing the same
CANON KK8 citations73