Inventor · disambiguated record

Harunobu Hirano

Also filed as: HIRANO HARUNOBU

1 granted patent·1 pending application·21 citations·filing 1997–2001

41Inventor score

Technology areasG03F

Files withSONY CORP1

Top patents by PatentIndex Score

2 records

0156US5821035AResist developing apparatus and resist developing methodSONY CORP·Filed 1997·Granted Oct 13, 1998·21 cites·17 claims
0218US2003054642A1Production method of semiconductor device and production system of semiconductor deviceFiled 2001·Application pending·0 cites

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Harunobu Hirano — Patent Inventor | PatentIndex