Inventor
IKEDA RIKIO
JP7 patents
Patents
7 patentsUS5395649AMar 7, 1995
Spin coating apparatus for film formation over substrate
SONY CORP56 citations94
US5378963AJan 3, 1995
Field emission type flat display apparatus
SONY CORP65 citations94
US6022672AFeb 8, 2000
Method of manufacturing semiconductors having improved temperature control
SONY CORP22 citations91
US5342738AAug 30, 1994
Resist film developing method and an apparatus for carrying out the same
SONY CORP27 citations91
US5821035AOct 13, 1998
Resist developing apparatus and resist developing method
SONY CORP21 citations85
US5473219ADec 5, 1995
Field emission type flat display apparatus
SONY CORP15 citations72
US5840445ANov 24, 1998
Method of manufacturing a self-aligned phase-shifting mask
SONY CORP5 citations61