Inventor
OHBUCHI KAZUTO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “OHBUCHI KAZUTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
4 patentsUS5846329ADec 8, 1998
Plasma processing apparatus
TOKYO OHKA KOGYO CO LTD72 citations94
US5922134AJul 13, 1999
Simultaneous discharge device
TOKYO OHKA KOGYO CO LTD24 citations89
US6995096B2Feb 7, 2006
Method for forming multi-layer wiring structure
TOKYO OHKA KOGYO CO LTD1 citations61
US6723633B2Apr 20, 2004
Method for forming multi-layer wiring structure
TOKYO OHKA KOGYO CO LTD0 citations51