Inventor
KANG HEE-SE
KR3 patents
Patents
3 patentsUS6604012B1Aug 5, 2003
Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the same
SAMSUNG ELECTRONICS CO LTD75 citations92
US5983704ANov 16, 1999
Method of measuring and analyzing contamination particles generated during the manufacture of semiconductor devices
SAMSUNG ELECTRONICS CO LTD18 citations91
US5880355AMar 9, 1999
Apparatus for measuring contamination particles during the manufacture of semiconductor devices
SAMSUNG ELECTRONICS CO LTD11 citations72