Inventor
MOON SANG-YOUNG
KR7 patents
Patents
7 patentsUS5983704ANov 16, 1999
Method of measuring and analyzing contamination particles generated during the manufacture of semiconductor devices
SAMSUNG ELECTRONICS CO LTD18 citations91
US5880355AMar 9, 1999
Apparatus for measuring contamination particles during the manufacture of semiconductor devices
SAMSUNG ELECTRONICS CO LTD11 citations72
US5871812AFeb 16, 1999
Apparatus and method for depositing molecular impurities on a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD6 citations60
US5731592AMar 24, 1998
Exhaust system for an ion implanter
SAMSUNG ELECTRONICS CO LTD6 citations59
US5827396AOct 27, 1998
Device for turning a wafer during a wet etching process
SAMSUNG ELECTRONICS CO LTD5 citations58
US5863411AJan 26, 1999
Method for forming a minute pattern in a metal workpiece
SAMSUNG ELECTRONICS CO LTD5 citations54
US5814822ASep 29, 1998
Ion implanter and ion implanting method using the same
SAMSUNG ELECTRONICS CO LTD0 citations45