Inventor
LANGSTON JOSEPH C
US3 patents
Patents
3 patentsUS6051344AApr 18, 2000
Multiple reduction photolithography technique
INTEL CORP22 citations89
US5503959AApr 2, 1996
Lithographic technique for patterning a semiconductor device
INTEL CORP32 citations87
US5688409ANov 18, 1997
Processes for fabricating device layers with ultrafine features
INTEL CORP14 citations71