Inventor

SHAW THOMAS MCARRAOLL

US3 patents

Patents

3 patents

US6172385B1Jan 9, 2001

Multilayer ferroelectric capacitor structure

IBM155 citations97

US6777809B2Aug 17, 2004

BEOL decoupling capacitor

IBM7 citations73

US6525427B2Feb 25, 2003

BEOL decoupling capacitor

IBM11 citations73