Inventor

KAWATA SHIGERU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “KAWATA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAIHACHI CHEM IND

2 patents

US5616768AApr 1, 1997

Process for purifying phosphoric esters

DAIHACHI CHEM IND18 citations88

US5880308AMar 9, 1999

Process for preparing aromatic bisphosphates

DAIHACHI CHEM IND4 citations59

TOKYO OHKA KOGYA CO LTD

1 patent

US7381270B2Jun 3, 2008

Slit nozzle and apparatus for supplying treatment liquid using slit nozzle

TOKYO OHKA KOGYA CO LTD2 citations59

SHIMAI FUTOSHI

1 patent

US8189169B2May 29, 2012

Cooling apparatus and substrate treating apparatus

SHIMAI FUTOSHI1 citations47