Inventor
BUSHMAN SCOTT
US5 patents
Patents
5 patentsUS6546306B1Apr 8, 2003
Method for adjusting incoming film thickness uniformity such that variations across the film after polishing minimized
ADVANCED MICRO DEVICES INC25 citations91
US7324865B1Jan 29, 2008
Run-to-run control method for automated control of metal deposition processes
ADVANCED MICRO DEVICES INC28 citations90
US6850322B2Feb 1, 2005
Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace
ADVANCED MICRO DEVICES INC9 citations73
US6709797B1Mar 23, 2004
Method and apparatus for controlling focus based on a thickness of a layer of photoresist
ADVANCED MICRO DEVICES INC3 citations52
US6417912B1Jul 9, 2002
Method and apparatus for controlling optical-parameters in a stepper
ADVANCED MICRO DEVICES INC1 citations46