Inventor
YE QIANQIU CHRISTINE
US5 patents
Patents
5 patentsUS6475069B1Nov 5, 2002
Control of removal rates in CMP
RODEL INC21 citations92
US6447373B1Sep 10, 2002
Chemical mechanical polishing slurries for metal
RODEL INC21 citations91
US6699299B2Mar 2, 2004
Composition and method for polishing in metal CMP
RODEL INC34 citations90
US6616717B2Sep 9, 2003
Composition and method for polishing in metal CMP
RODEL INC28 citations90
US6530824B2Mar 11, 2003
Method and composition for polishing by CMP
RODEL INC15 citations80