Inventor
LAU ALLEN
US9 patents
Patents
9 patentsUS7480129B2Jan 20, 2009
Detachable electrostatic chuck for supporting a substrate in a process chamber
APPLIED MATERIALS INC87 citations97
US6837968B2Jan 4, 2005
Lower pedestal shield
APPLIED MATERIALS INC40 citations96
US6726805B2Apr 27, 2004
Pedestal with integral shield
APPLIED MATERIALS INC56 citations96
US6652713B2Nov 25, 2003
Pedestal with integral shield
APPLIED MATERIALS INC47 citations96
US7907384B2Mar 15, 2011
Detachable electrostatic chuck for supporting a substrate in a process chamber
APPLIED MATERIALS INC13 citations92
US7697260B2Apr 13, 2010
Detachable electrostatic chuck
APPLIED MATERIALS INC35 citations92
US7252737B2Aug 7, 2007
Pedestal with integral shield
APPLIED MATERIALS INC22 citations92
US6669829B2Dec 30, 2003
Shutter disk and blade alignment sensor
APPLIED MATERIALS INC17 citations91
US6827825B2Dec 7, 2004
Method for detecting the position of a shutter disk in a physical vapor deposition chamber
APPLIED MATERIALS INC12 citations72