Inventor
CHU HONG-YUAN
TW3 patents
Patents
3 patentsUS6767831B1Jul 27, 2004
Method for forming cobalt salicides
TAIWAN SEMICONDUCTOR MFG24 citations89
US6866988B2Mar 15, 2005
Methods for measuring photoresist dimensions
TAIWAN SEMICONDUCTOR MFG5 citations59
US7374956B2May 20, 2008
Method for improved metrology by protecting photoresist profiles
TAIWAN SEMICONDUCTOR MFG0 citations45