Inventor
BROERMANN OLIVER
DE3 patents
Patents
3 patentsUS6980304B2Dec 27, 2005
Method for measuring a characteristic dimension of at least one pattern on a disc-shaped object in a measuring instrument
INFINEON TECHNOLOGIES AG2 citations56
US6897422B2May 24, 2005
Measuring configuration and method for measuring a critical dimension of at least one feature on a semiconductor wafer
INFINEON TECHNOLOGIES AG4 citations54
US7405024B2Jul 29, 2008
Lithographic mask, and method for covering a mask layer
INFINEON TECHNOLOGIES AG0 citations48